发明名称 |
PLASMA GENERATION DEVICE WITH SPLIT-RING RESONATOR AND ELECTRODE EXTENSIONS |
摘要 |
A plasma generation device includes: a substrate having a first surface and a second surface; a stripline resonant ring disposed on the first surface of the substrate, and defining a discharge gap; a pair of electrode extensions connected to the stripline resonant ring at the discharge gap; a ground plane disposed on the second surface of the substrate; a gas flow element configured to flow gas between at least one of: (1) the discharge gap, and (2) the pair of electrode extensions; and a structure disposed adjacent the substrate to form an enclosure that substantially encloses at least a region including the discharge gap and the electrode extensions, the enclosure being adapted to contain a plasma.
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申请公布号 |
US2011175531(A1) |
申请公布日期 |
2011.07.21 |
申请号 |
US20100688082 |
申请日期 |
2010.01.15 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
URDAHL RANDALL;COOLEY JAMES EDWARD;LEE GREGORY S.;HIDALGO AUGUST JON;GUTH MARTIN L. |
分类号 |
H05H1/24 |
主分类号 |
H05H1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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