发明名称 PACKAGE STRUCTURE HAVING MEMS ELEMENT
摘要 A package structure having at least an MEMS element is provided, including a chip having electrical connecting pads and the MEMS element; a lid disposed on the chip to cover the MEMS element and having a metal layer provided thereon; first sub-bonding wires electrically connecting to the electrical connecting pads; second sub-bonding wires electrically connecting to the metal layer; an encapsulant disposed on the chip, wherein the top ends of the first and second sub-bonding wires are exposed from the encapsulant; and metallic traces disposed on the encapsulant and electrically connecting to the first sub-bonding wires. The package structure advantageously features reduced size, relatively low costs, diverse bump locations, and an enhanced EMI shielding effect.
申请公布号 US2011175179(A1) 申请公布日期 2011.07.21
申请号 US20100769993 申请日期 2010.04.29
申请人 SILICONWARE PRECISION INDUSTRIES CO., LTD. 发明人 CHIU CHI-HSIN;HUANG CHIH-MING;CHAN CHANG-YUEH;LIAO HSIN-YI;KE CHUN-CHI
分类号 H01L29/84;H01L23/52 主分类号 H01L29/84
代理机构 代理人
主权项
地址