| 发明名称 |
METHOD FOR PRODUCING METAL OXIDE LAYERS |
| 摘要 |
The invention relates to a method for producing metal oxide layers from oxides of rare earth metals on silicon-containing surfaces, to the device used to carry out the coating method, and to the use of the starting materials used in the method according to the invention for the coating method.
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| 申请公布号 |
US2011175207(A1) |
申请公布日期 |
2011.07.21 |
| 申请号 |
US200913000809 |
申请日期 |
2009.06.23 |
| 申请人 |
CARL VON OSSIETZKY UNIVERSITAET OLDENBURG |
发明人 |
SCHNARS HANNO;WICKLEDER MATHIAS;AL-SHAMERY KATHARINA |
| 分类号 |
H01L23/58;B05B17/00;B05C3/02;B05C11/00;B05C11/11;B05C13/02;H01L21/473 |
主分类号 |
H01L23/58 |
| 代理机构 |
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