发明名称 |
Compensating Masks, Multi-Optical Systems Using the Masks, and Methods of Compensating for 3-D Mask Effect Using the Same |
摘要 |
Provided are a compensating mask, a multi-optical system using the compensating mask, and a method of compensating for a 3-dimensional (3-D) mask effect using the compensating mask. Methods of compensating for a 3-D mask effect using a compensating mask may include generating a first kernel corresponding to a normal mask used for forming a minute pattern, generating a second kernel corresponding to a compensating mask, mixing the first kernel corresponding to the normal mask with the second kernel corresponding to the compensating mask, and generating a multi-optical system kernel corresponding to mixing the first kernel and the second kernel.
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申请公布号 |
US2011177437(A1) |
申请公布日期 |
2011.07.21 |
申请号 |
US201113079078 |
申请日期 |
2011.04.04 |
申请人 |
SUH SUNG-SOO;LEE SUK-JOO;CHO HAN-KU;CHUN YONG-JIN;LEE SUNG-WOO;KIM YOUNG-CHANG |
发明人 |
SUH SUNG-SOO;LEE SUK-JOO;CHO HAN-KU;CHUN YONG-JIN;LEE SUNG-WOO;KIM YOUNG-CHANG |
分类号 |
G03F1/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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