ION BEAM IRRADIATION DEVICE EQUIPPED WITH MAGNET HAVING A PLURALITY OF ELECTRON CONFINING MIRROR MAGNETIC FIELD FORMING MEMBERS

摘要

PROBLEM TO BE SOLVED: To suppress the spread of ion beams due to space charge effects by effectively confining electrons between the magnetic poles of a magnet which deflects, converges or diverges the ion beams. SOLUTION: This ion beam irradiation device includes the magnet 6 arranged between an ion source 2 and a target W to hold the ion beams IB therebetween for deflecting the ion beams IB to irradiate the target W therewith, mirror magnetic field forming members 11 for forming an electron confining region in relation to the intensity of a magnetic field generated by the magnet 6, and the pair of magnetic poles 61a, 61b constituting the magnet 6, and provided with the plurality of mirror magnetic field forming members 11 opposing each other in a direction along the magnetic field generated by the magnet 6. The mirror magnetic field forming members 11 are arranged to satisfy a relationship of Wc≥Wa, where Wcis a size when the width of the electron confining region is maximum in the direction perpendicular to the magnetic field generated between the magnetic poles and Wais a space between the adjacent mirror magnetic filed forming members 11 provided on the magnetic poles 61a, 61b. COPYRIGHT: (C)2011,JPO&INPIT