| 摘要 |
PROBLEM TO BE SOLVED: To provide a bubble removing device capable of preventing the generation of bubbles and of preventing the discharge of a coating liquid contaminated with bubbles if the coating liquid to be supplied is contaminated with bubbles, and a substrate treating apparatus including the same. SOLUTION: The bubble removing device that removes bubbles present in a coating liquid supplied from a coating liquid tank to an applicator for applying a coating liquid onto a substrate and includes a container 21 wherein a separation plate 25 is tiltingly disposed to divide the same into a lower section adjacent to the bottom face 44 thereof and an opposite upper section adjacent to the upper face 43 thereof, with at least some of a plurality of liquid flow holes 25b that penetrate the separation plate 25 in the thickness direction thereof formed on the lowest end part 51 disposed on the lowest position of the separation plate 25, is characterized in that the coating liquid ejected from an ejection port 45a is allowed to flow down on a sidewall 45b facing the lowest end part 51, via the liquid flow holes 25b. COPYRIGHT: (C)2011,JPO&INPIT
|
