发明名称 |
METHODS OF FORMING A SEMICONDUCTOR CELL ARRAY REGION, METHOD OF FORMING A SEMICONDUCTOR DEVICE INCLUDING THE SEMICONDUCTOR CELL ARRAY REGION, AND METHOD OF FORMING A SEMICONDUCTOR MODULE INCLUDING THE SEMICONDUCTOR DEVICE |
摘要 |
Methods of forming a semiconductor cell array region, a method of forming a semiconductor device including the semiconductor cell array region, and a method of forming a semiconductor module including the semiconductor device are provided, the methods of forming the semiconductor cell array region include preparing a semiconductor plate. A semiconductor layer may be formed over the semiconductor plate. The semiconductor layer may be etched to form semiconductor pillars over the semiconductor plate.
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申请公布号 |
US2011177671(A1) |
申请公布日期 |
2011.07.21 |
申请号 |
US20100958858 |
申请日期 |
2010.12.02 |
申请人 |
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发明人 |
HYUN SUNG-WOO;LEE BYEONG-CHAN;LEE SUN-GHIL;SON YONG-HOON |
分类号 |
H01L21/762 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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