| 摘要 |
A thermal process is disclosed. The thermal process preferably includes the steps of: providing a semiconductor substrate ready to be heated; and utilizing at least a first heating beam and a second heating beam with different energy density to heat the semiconductor substrate simultaneously. Accordingly, the present invention no only eliminates the need of switching between two different thermal processing equipments and shortens the overall fabrication cycle time, but also improves the pattern effect caused by the conventional front side heating.
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