SUBSTRATE-INSPECTING DEVICE

摘要

Disclosed is a substrate-inspecting device, which can improve the accuracy of inspection. The substrate-inspecting device comprises at least one lighting module, an imaging lens, a first beam splitter, and a first camera and a second camera. The lighting module sheds light on a substrate being inspected, and the imaging lens transmits light reflected from the substrate being inspected. The first beam splitter transmits a portion of light transmitted through the imaging lens, and reflects the rest of the light. The first camera receives light transmitted through the first beam splitter and captures images, and the second camera receives the light reflected by the first beam splitter and captures images. According to the present invention, as the substrate is inspected using only one imaging lens, degradation in the accuracy of inspection is prevented, in contrast to conventional devices which use multiple imaging lenses which have variations in optical axes or magnifications.