发明名称 |
ROLL-TO-ROLL EVAPORATION SYSTEM AND METHOD TO MANUFACTURE GROUP IBIIIAVIA PHOTOVOLTAICS |
摘要 |
<p>The present inventions provide method and apparatus that employ constituents vaporized from one or more constituent supply source or sources to form one or more films of a precursor layer formed on a surface of a continuous flexible workpiece. Of particular significance is the implementation of vapor deposition systems that operate upon a horizontally disposed portion of a continuous flexible workpiece and a vertically disposed portion of a continuous flexible workpiece, preferably in conjunction with a short free-span zone of the portion of a continuous flexible workpiece.</p> |
申请公布号 |
WO2011088035(A1) |
申请公布日期 |
2011.07.21 |
申请号 |
WO2011US20816 |
申请日期 |
2011.01.11 |
申请人 |
SOLOPOWER, INC. |
发明人 |
VASQUEZ, JORGE;FREITAG, JAMES;PINARBASI, MUSTAFA |
分类号 |
H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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