| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the effect of an elastic vibration mode in a real apparatus even when there is an error in deformation shape of the elastic vibration mode or an error in actuator arrangement. <P>SOLUTION: A positioning apparatus includes: a tabletop having a plane; a plurality of actuators configured to be driven in a direction perpendicular to the plane to move the tabletop; and a control unit configured to measure a frequency response of the tabletop and, when a peak is detected at the resonance frequency of elastic vibration of the tabletop, adjust the thrust distribution ratio for the plurality of actuators to reduce the peak. <P>COPYRIGHT: (C)2011,JPO&INPIT |
