发明名称 METHOD AND DEVICE FOR SYMMETRIC AND/OR CONCENTRIC RADIO FREQUENCY MATCHING CIRCUIT NET
摘要 <P>PROBLEM TO BE SOLVED: To provide a method and device in which an impedance of an electric load is adjusted to be matched to an impedance of an electrical signal generator. <P>SOLUTION: The device is provided with a first connector 202 having a first longitudinal axis, a second connector 228 having a second longitudinal axis, and a component assembly including one or more of components 204. At least one of the components 204 is connected with the first connector 202 and one of the components 204 is connected with the second connector 228, and one or more of the components 204 are arranged symmetrically centering on a third axis, and moreover, a fluid cooling means 218 for supplying cooling fluid uniformly to the components 204 is provided, and moreover, the components 204 are capacitors. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011142098(A) 申请公布日期 2011.07.21
申请号 JP20110034084 申请日期 2011.02.21
申请人 APPLIED MATERIALS INC 发明人 SORENSEN CARL;JOHN M WHITE
分类号 H05H1/46;H03H7/38 主分类号 H05H1/46
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