METHOD FOR PRODUCING THIN SHEET GLASS STRIP AND ORGANIC ELECTROLUMINESCENT ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a thin sheet glass strip in which a thin film such as a transparent conductive film, particularly a tin oxide film is deposited on a surface of thin sheet glass for an organic EL glass substrate, while achieving a sufficiently low sheet resistance, preventing the formation of large crystal grains so as to ensure surface smoothness, and maintaining high productivity.

SOLUTION: A glass plate 20 is heated and drawn in a redraw heating furnace 1 and a thin film comprising an inorganic material is deposited by a thermal CVD method on a surface of the resulting glass strip 21 after drawing. The glass strip 21 is then reheated in a preheating furnace 6 for film deposition and a thin film comprising the inorganic material is deposited by the thermal CVD method on the surface of the glass strip 21 at a temperature higher than the temperature in the first film deposition.

COPYRIGHT: (C)2011,JPO&INPIT