发明名称 DROPLET EJECTION APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a droplet ejection apparatus capable of preventing the malfunctioning of a carriage caused by mist. SOLUTION: The droplet ejection apparatus includes a droplet ejection head 60 that ejects UV-curable droplets onto a substrate, a lamp unit comprising a lamp member irradiating a substrate whereon the droplets are ejected with ultraviolet rays, and a head moving mechanism comprising a guide member 66 that guides a carriage 69 holding the droplet ejection head 60. Pieces of a reflection preventing film 150 for preventing the reflection of ultraviolet rays are each disposed on UV-reflecting areas that reflect the ultraviolet rays leaking from a substrate inlet or substrate outlet of the lamp unit in the direction of the guide member 66. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011139971(A) 申请公布日期 2011.07.21
申请号 JP20100000438 申请日期 2010.01.05
申请人 SEIKO EPSON CORP 发明人 NAKAMURA TOMONORI
分类号 B05C9/12;B05C5/00;H01L21/66 主分类号 B05C9/12
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