MICRO-MIRROR DEVICE SORTING METHOD, MICRO-MIRROR DEVICE SORTING APPARATUS, AND MASKLESS EXPOSURE APPARATUS

摘要

PURPOSE: A method for sorting micro mirror devices, an apparatus for the micro mirror devices, and a maskless exposing apparatus are provided to improve the quality and the reliability of the maskless exposing apparatus by sorting micro mirror devices with the superior flatness. CONSTITUTION: Illuminating light is radiated to the micro mirror(21) of a micro mirror device(2) and takes images related to the diffracted light distribution of the micro mirror. Information of a plurality of diffracted light distributions based on an exposing simulation result is compared with the information related to the diffracted light distribution of the micro mirror. Based on the result, information related to the quality of the micro mirror device and the image of the diffracted light distribution of the micro mirror are displayed.