| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrating reed reducing a vibration loss, and having high detection sensitivity when being used as an angular velocity sensor. <P>SOLUTION: The vibrating reed 10 includes: a base part 20; a plurality of vibrating arms 40, 50 extended from the base part 20, each having a first principal surface 11 and a second principal surface 12 opposed to each other and side surfaces 41, 51 and side surfaces 42, 52 connecting the first principal surface 11 and the second principal surface 12 and opposed to each other, the side surface 41 of at least one vibrating arm 40 having a first step part 43 provided from the first principal surface 11 side and a second step part 44 provided from the second principal surface 12 side; a detection electrode provided on the side surface 42 of the vibrating arm 40; a detection electrode provided in a position opposed to the detection electrode of the first step part 43; and a detection electrode provided in a position opposed to the detection electrode of the second step part 44. <P>COPYRIGHT: (C)2011,JPO&INPIT |
