| 摘要 |
<P>PROBLEM TO BE SOLVED: To relatively easily control the feature of a concave portion formed in a substrate for a liquid crystal device. <P>SOLUTION: The method for manufacturing a substrate for a liquid crystal device includes: a resist pattern forming step of forming a resist pattern (230) having a plurality of apertures (231) on a substrate (210); a concave portion forming step of forming a plurality of concave portions on the substrate by etching the substrate by using the resist pattern; an ashing step of ashing the resist pattern so as to expand each of the plurality of apertures; and an etching step of etching the substrate by using the ashed resist pattern (2231') so as to expand each of the plurality of concave portions. By alternately repeating the ashing step and the etching step in several times, each of the plurality of concave portions can be formed into a feature corresponding to an aspheric lens. <P>COPYRIGHT: (C)2011,JPO&INPIT |
