发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To obtain a bump and an under barrier metal structure that can withstand the narrow pitch between bumps while maintaining the strength. <P>SOLUTION: A semiconductor device includes a semiconductor chip 1, an electrode pad 2 formed on the semiconductor chip 1, an under barrier metal 10 formed on the electrode pad 2, a solder bump 6 formed on the under barrier metal 10, and an underfill material 18 formed to cover the circumference of the under barrier metal 10 and the solder bump 6. The top surface of the under barrier metal 10 serves as the junction interface of the solder bump 6 and the under barrier metal 10, and the underfill material 18 forms a right angle or an obtuse angle at the joint of the side of the bump 6 and the edge of the under barrier metal 10. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011142119(A) 申请公布日期 2011.07.21
申请号 JP20100000409 申请日期 2010.01.05
申请人 PANASONIC CORP 发明人 TSUJIMOTO SHINYA
分类号 H01L21/60 主分类号 H01L21/60
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