| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin sheet member washing apparatus efficiently washing the thin sheet member without breaking it. SOLUTION: A rotary arm member 527 supporting a mesh member holding part 530 is rotated by using a rotation handle 524 to allow tap water flow on the surface of a mesh member 160 to remove chemical dregs attached to the mesh member 160. COPYRIGHT: (C)2011,JPO&INPIT |
