| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating composition that has superior burying and coating properties, and can form a siliceous film having superior film properties, and to provide a method of forming the siliceous film using the coating composition. SOLUTION: The coating composition includes perhydropolysilazane and a solvent, and a molecular weight distribution curve of the perhydropolysilazane has local maximums in a molecular weight range of 800 to 2,500 and a molecular weight range of 3,000 to 8,000, respectively, and the ratio Mw/Mn between weight average molecular weight Mw and number-average molecular weight Mn is 6 to 12. By performing the coating on a substrate having a gap of the coating composition and performing the heating at temperature equal to or lower than 1,000°C, the siliceous film buried up to a gap deep part can be formed. COPYRIGHT: (C)2011,JPO&INPIT
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