METHODS AND SYSTEMS OF MANUFACTURING PHOTOVOLTAIC DEVICES

摘要

A system (200) for fabricating a photovoltaic device including a semiconductor wafer (211) comprises a laser device (202) configured to generate a laser beam (230) and a laser scanning device configured to scan the laser beam (230) on the wafer (211) to locally heat a surface of the wafer (211). The laser scanning device comprises a beam splitting module (205) configured to split the laser beam into at least two sub-beams of equal amount of laser power; at least two scanners (208) configured to steer the sub-beams (232) scanning along a predetermined scan path defined on the wafer (211); and at least two lenses (209) configured to focus the steered sub-beams (232) at a focal point that coincides with the predetermined scan path.