| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide alignment equipment which can perform the accurate alignment of original plates of reflection types, and the accurate measurement of the on-axis TTL alignment on the exposure equipment. <P>SOLUTION: The alignment equipment for alignment of the original plates of the reflection types comprises a light source 20 for emitting alignment light for alignment, an optical unit which guides the alignment light emitted by the light source 20 toward a plurality of alignment marks 4 and 5 formed on the original plates and a plurality of reference marks 2 and 3 formed on an original plate stage 6 for holding the original plates, and an alignment section which aligns the original plates on the original plate stage 6 with reference to the original plate stage 6 by receiving the alignment light passing through the original plate alignment marks 4 and 5 and the original plate stage reference marks 2 and 3. <P>COPYRIGHT: (C)2007,JPO&INPIT |
