发明名称 APPARATUS FOR POLISHING CARRIER INSERT
摘要 PURPOSE: A carrier insert grinding device is provided to improve the state of a carrier insert by directly grinding the carrier insert without probe inspection about the carrier insert. CONSTITUTION: A carrier insert grinding device comprises a disc-shaped grinding member(110), a supporting member(120), an elastic member, and a grip member. The grinding member is inserted into the carrier insert and divided. The supporting member is located at the center of the grinding member. The elastic member supplies the elastic force to the grinding member in the radial direction. The grip member guides the grinding member to the supporting member. The grinding member can be projected in the radial direction.
申请公布号 KR20110082731(A) 申请公布日期 2011.07.20
申请号 KR20100002606 申请日期 2010.01.12
申请人 LG SILTRON INCORPORATED 发明人 KWON, KI SOO;CHO, HEUI DON;JI, DONG OUK
分类号 B24B37/04;H01L21/304 主分类号 B24B37/04
代理机构 代理人
主权项
地址