| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat exchanger having a heat pipe surely fixed between a pair of metal plates and having high thermal conductivity, which, in particular, serves as a cold plate for cooling a linear stage. SOLUTION: Grooves 11, 21 for accommodating heat pipes 30 are formed inside of metal plates 10, 20 which are combined face to face. The grooves 11, 21 are formed in such a way that, when combined, each of their cross sections has a shape of a polygon.
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