| 摘要 |
<p>PURPOSE: A modular power supply unit of a reactor for producing poly-silicon is provided to flexibly control the power supply unit without reconstructing the power supply unit. CONSTITUTION: A modular power supply unit includes the following: a transformer(40) including multiple first tabs(401,406); a node(12) connected to a first connection unit(131) of an output unit of a base supply module(B); and the base supply module securing the basic load supply or the control supply on silicon rods(R1,R4). The peak voltage is applied in between the first tabs and a second tab.</p> |
