发明名称 Detection apparatus for optical reflectance measurement
摘要 <p>A detection apparatus which illuminates a sample (4) and detects light reflected by the sample, comprises a light source (1), a columnar reflecting member (3) having a columnar reflecting surface (3s) which reflects light having entered a first end (3a) of the columnar reflecting member by a plurality of number of times, and emits the light from a second end (3b) of the columnar reflecting member, a mirror (2) which reflects light radiated by the light source so as to guide to the first end and a detector, wherein the sample (4) is illuminated with the light emitted from the second end, and the detector (6) is configured to detect the light which has been reflected by the sample and has passed through the columnar reflecting member (3), and a reflecting surface (2) of the mirror is a concave surface, and a shape of a reflecting surface of the mirror on a section perpendicular to an axis of the columnar reflecting member is concave.</p>
申请公布号 EP2345888(A1) 申请公布日期 2011.07.20
申请号 EP20100188359 申请日期 2010.10.21
申请人 CANON KABUSHIKI KAISHA 发明人 SUMIYOSHI, YUHEI;TOKIMITSU, TAKUMI;YUUKI, HIROYUKI
分类号 G01N21/64;G01N21/01;G01N21/27;G01N21/47;G02B27/09 主分类号 G01N21/64
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