发明名称 MANUFACTURING METHOD FOR THE HIGH RESOLUTION ORGANIC THIN FILM PATTERN
摘要 <p>PURPOSE: A method for forming an organic thin film pattern with high resolution is provided to optically lift off a sacrificial layer to form a pattern, thereby easily forming an organic thin film pattern of high resolution. CONSTITUTION: A first organic layer(130) is formed on a substrate(110). Light energy is irradiated onto the first organic layer to selectively eliminate the first organic layer. A sacrificial layer is formed on a part where the first organic layer remains. A second organic layer is formed on the substrate and the sacrificial layer. The second organic layer is lifted off to form a second organic layer pattern.</p>
申请公布号 KR20110082415(A) 申请公布日期 2011.07.19
申请号 KR20100002377 申请日期 2010.01.11
申请人 SAMSUNG MOBILE DISPLAY CO., LTD.;SNU R&DB FOUNDATION 发明人 SUH, MIN CHUL;LEE, SIN DOO;CHOI, WON SUK;KIM, MIN HOI
分类号 H01L21/027;H01L51/50 主分类号 H01L21/027
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