MANUFACTURING METHOD FOR THE HIGH RESOLUTION ORGANIC THIN FILM PATTERN
摘要
<p>PURPOSE: A method for forming an organic thin film pattern with high resolution is provided to optically lift off a sacrificial layer to form a pattern, thereby easily forming an organic thin film pattern of high resolution. CONSTITUTION: A first organic layer(130) is formed on a substrate(110). Light energy is irradiated onto the first organic layer to selectively eliminate the first organic layer. A sacrificial layer is formed on a part where the first organic layer remains. A second organic layer is formed on the substrate and the sacrificial layer. The second organic layer is lifted off to form a second organic layer pattern.</p>
申请公布号
KR20110082415(A)
申请公布日期
2011.07.19
申请号
KR20100002377
申请日期
2010.01.11
申请人
SAMSUNG MOBILE DISPLAY CO., LTD.;SNU R&DB FOUNDATION
发明人
SUH, MIN CHUL;LEE, SIN DOO;CHOI, WON SUK;KIM, MIN HOI