APPARATUS FOR RINSING A SUBSTRATE

摘要

PURPOSE: A substrate rinse device is provided to spray air onto a substrate, thereby preventing rinse liquid from deviating from entering an entrance area. CONSTITUTION: A rinse chamber(110) comprises a rinse processing space. A substrate transfer unit(120) horizontally transfers a substrate using transfer rollers in the rinse chamber. A spray unit(130) includes a plurality of nozzles for spraying rinse liquid onto the substrate. An air knife(140) sprays air onto the substrate to prevent rinse liquid from entering an entrance area. A drain unit(150) drains rinse liquid from the substrate.