发明名称 Polymer and chemically amplified resist composition comprising the same
摘要 The present invention provides a polymer containing a structural unit represented by the formula (Ia) or (Ib): wherein R1, R2, R3, n, Z1, R4, R5 and m are defined in the specification, a structural unit represented by the formula (II): wherein R6, R7, R8, R9, Z2, n′ and Z′ are defined in the specification, and a structural unit represented by the formula (III): wherein R10, R11, 1′ and Z3 are defined in the specification.
申请公布号 US7981985(B2) 申请公布日期 2011.07.19
申请号 US20090426038 申请日期 2009.04.17
申请人 SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 FUJI YUSUKE;HATA MITSUHIRO
分类号 C08F224/00;C08F4/04;G03F7/004 主分类号 C08F224/00
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