| 摘要 |
PURPOSE: A substrate processing device and a method thereof are provided to partition a unit with a slope converting function into at least two parts and to individually operate the two parts, thereby shortening substrate processing time. CONSTITUTION: A substrate processing device(300) comprises a first section(310), a second section(320), a third section(330), a fourth section(340), and a fifth section(350). A substrate is developed, cleaned, and dried while the substrate moves from the first section to the fifth section. A substrate transfer unit(360) tilts a substrate for an efficient cleaning process. The substrate transfer unit includes a plurality of shafts(362) and a plurality of rollers(364). The rollers are installed in the shafts respectively.
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