| 摘要 |
PURPOSE: A maskless light exposure device and method for processing frame data of the device are provided to reduce memory access time for generating frame data, thereby immediately coping with correction requests. CONSTITUTION: A substrate(12) is mounted on a stage(10). A light source(20) transfers laser light for light exposure to a light exposure unit(30). The light exposure unit includes a DMD(32), a first projection lens(34), a micro lens array(36), and a second projection lens(38). The DMD(Digital Micro-mirror Device) selectively irradiates light without a separate mask. A location measuring unit(40) measures the location of the stage. |
