发明名称 Photoresist composition and method of manufacturing a display substrate using the same
摘要 A photoresist composition includes an alkali-soluble resin, a dissolution inhibitor including a quinone diazide compound, a first additive including a benzenol compound represented by the following Chemical Formula 1, a second additive including an acrylic copolymer represented by the following Chemical Formula 2 and an organic solvent. Accordingly, heat resistance of a photoresist pattern may be improved, and the photoresist pattern may be readily stripped. As a result, crack formation in the photoresist pattern may be reduced and/or prevented.
申请公布号 US7981706(B2) 申请公布日期 2011.07.19
申请号 US20100891940 申请日期 2010.09.28
申请人 SAMSUNG ELECTRONICS CO., LTD.;DONGWOO FINE-CHEM 发明人 PARK JEONG-MIN;LEE JUNG-SOO;CHANG WON-YOUNG;LEE EUN-SANG;YU IN-HO;KIM SEONG-HYEON
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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