| 摘要 |
<p>The present invention has been made in order to construct a CIM system that is capable of reducing burden on a host computer and instructing processing conditions by the unit of substrate and a start order of work by the unit of substrate. In the present invention, a recipe applied to each substrate is managed in each manufacturing apparatus rather than being managed in a host computer. One or a plurality of numbered recipes are stored in each manufacturing apparatus. With the structure described above, even if decision of a recipe and an order of work of a manufacturing apparatus is managed by the unit of substrate rather than by the unit of carrier, since it is unnecessary to manage concrete contents of a recipe for each substrate in each manufacturing apparatus in the host computer, burden on the host computer can be reduced.</p> |
