| 摘要 |
<P>PROBLEM TO BE SOLVED: To stabilize the characteristics of a spatial light modulator for a long period. <P>SOLUTION: The spatial light modulator has: a substrate; and a reflection mirror which rocks with respect to the substrate. The reflection mirror has: a reflection face; and a structure material which includes a face intersecting with the reflection face and is disposed on the back face of the reflection face to resist to bending stress acting on the reflection face. In the spatial light modulator, the structure material may have a bottom face further intersecting with the face. Also, in the spatial light modulator, the structure material may have a through hole which performs communicative connection between the space, enclosed by the structure material and the reflection face, and the outside of the space. <P>COPYRIGHT: (C)2011,JPO&INPIT |
