VACUUM PROCESSING DEVICE AND VACUUM PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a low-cost vacuum processing device with cycle time shortened. SOLUTION: This vacuum processing device 1 composed of a plurality of load lock chambers 11-14 and a plurality of process chambers 51-54 communicating with the load lock chambers through opening/closing portions includes at least: one first evacuator 31 selecting and evacuating each load lock chamber; a plurality of second evacuators 71-74 provided for every process chambers and individually evacuating the process chambers; a controller issuing evacuation requests with priority according to the conditions of the load lock chambers added when a need to evacuate the load lock chambers arises; and an order adjuster adjusting the order of the plurality of evacuation requests according to the priority to thereby select one load lock chamber subjected to an evacuation process by the first evacuator from among the plurality of load lock chambers and instruct the opening/closing operation of a first valve. COPYRIGHT: (C)2011,JPO&INPIT