发明名称 POLARIZATION-MODULATING OPTICAL ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a polarization-modulating optical element which affects polarization of a light ray. <P>SOLUTION: The polarization-modulating optical element (1) consisting of an optical activity material has a thickness profile where the thickness, as measured in the direction of the optical axis, varies over the area of the optical element. The polarization-modulating optical element (1) has the effect that the plane of oscillation of a first linearly polarized light ray and the plane of oscillation of a second linearly polarized light ray are rotated, respectively, by a first angle of rotation and a second angle of rotation, with the first angle of rotation and the second angle of rotation being different from each other. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011138164(A) 申请公布日期 2011.07.14
申请号 JP20110069962 申请日期 2011.03.28
申请人 CARL ZEISS SMT GMBH 发明人 FIOLKA DAMIAN;DEGUENTHER MARKUS
分类号 G02B5/30;G02B1/08;G02B27/28;G02F1/01;G03F7/20;H01L21/027 主分类号 G02B5/30
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