| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve measurement precision by reducing drifting of measurements, when detecting a surface position of a surface to be inspected using an oscillating mirror. <P>SOLUTION: An AF system 90 for detecting surface position information of a surface to be inspected includes a projection system 90a for obliquely projecting detection light DL on the surface to be inspected, a light-receiving system 90b for receiving detection light reflected on the surface to be inspected, an oscillating mirror 38 having a movable part with a reflection plane formed for reflecting the detection light DL within the projection system 90a and a pair of supporting parts for supporting the movable part, a holding member 48 to which the support parts of the oscillating mirror 38 are fixed, a driving section 49 for oscillating the movable part of the oscillating mirror 38, and a signal processing system 25 for processing a detection signal obtained by the light-receiving system 90b, in synchronization with the oscillation of the movable part. <P>COPYRIGHT: (C)2011,JPO&INPIT |
