| 摘要 |
PROBLEM TO BE SOLVED: To reduce the consumption amount of a polishing tape and to prevent damage of a surface of a workpiece. SOLUTION: In this foreign matter polishing device, a projection part 20 for polishing and eliminating foreign matter by sliding one side of a width direction of the traveling polishing tape T, while pressing the side on foreign matter on the surface of the workpiece, is projectingly provided on the one side of the width direction of a sliding contact surface 17a with which the polishing tape T is in sliding contact, and a recessed part 21 capable of making the other side of the width direction of the traveling polishing tape T fall therein is recessed on the other side of the width direction of the sliding contact surface 17a, at a distal end of a pressing head 17 arranged between a delivering reel and a winding reel. COPYRIGHT: (C)2011,JPO&INPIT |
