METHANOFULLERENE DERIVATIVES, PHOTORESIST COMPOSITION CONTAINING IT AND METHOD FOR FORMING A RESIST LAYER
摘要
The invention provides methanofullerene derivatives having side chains with acid- labile protecting groups and their use as photoresist materials in a photoresist composition, and particularly as positive - tone photoresists.
申请公布号
WO2011061501(A3)
申请公布日期
2011.07.14
申请号
WO2010GB02129
申请日期
2010.11.18
申请人
THE UNIVERSITY OF BIRMINGHAM;ROBINSON, ALEX;PALMER, RICHARD;PREECE, JON, ANDREW
发明人
ROBINSON, ALEX;PALMER, RICHARD;PREECE, JON, ANDREW
