METHOD FOR MANUFACTURING PERPENDICULAR MAGNETIC RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To improve reliability and achieve higher recording density by enhancing durability to withstand sliding while ensuring a high SNR. SOLUTION: A method for manufacturing a perpendicular magnetic recording medium includes: a main recording layer-forming step of forming at least a main recording layer made of magnetic particles containing a CoCrPt alloy as a major component and non-magnetic grain boundary portions containing an oxide as a major component on a substrate; a separating layer-forming step of forming a separating layer made of a Ru alloy or a Co alloy as a major component on the main recording layer; a first heating step of performing a heating process on the substrate after the separating layer-forming step; an auxiliary recording layer-forming step of forming an auxiliary recording layer made of CoCrPt as a major component after the first heating step; a second heating step of performing a heating process on the substrate after the auxiliary recording layer-forming step; and a protective layer-forming step of forming a protective layer made of carbon as a major component by CVD after the second heating step. COPYRIGHT: (C)2011,JPO&INPIT