| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved method and an apparatus related to the supply of a precursor, particularly the supply of an organometallic compound, to reactor sites. SOLUTION: The method and the apparatus are used for the bulk supply of a precursor, such as an organometallic compound, from a bulk container, such as a bubbler 1 to a plurality of reactor sites 12, 14, 16, 18, and 20, wherein a carrier gas 2 is introduced into the container 1 of the precursor to pick up the precursor to form a gaseous mixture. The gaseous mixture is then selectively supplied to one or more of the plurality of reactor sites 12, 14, 16, 18, and 20. The gaseous mixture may be stored in a reservoir 9 and be drawn by means of a pressure differential or under vacuum to each of the reactor sites, when required. COPYRIGHT: (C)2011,JPO&INPIT
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