| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a rugged structure which can form a desired rugged structure without causing defects. SOLUTION: The method includes: a preparation step of preparing a die 2 with a rugged structure corresponding to the rugged structure 4 of a desired shape; a coating step of coating the surface of a solar cell substrate 6 with a liquid resin 10 hardened by external stimulation; an arranging step of arranging the die oppositely to the liquid resin coated on the surface of the substrate; a pressing step of relatively moving the die and the substrate and pressing the substrate with the die; a hardening step of applying the external stimulation to the liquid resin in a state where the substrate is pressed with the die, and transferring the rugged structure of the desired shape to the hardened resin; a step of removing the die from the surface of the substrate after the hardening step is carried out; and an etching step of, after the removal step is carried out, performing isotropic etching to the surface of the solar battery substrate together with the hardened resin where the rugged structure of the desired shape is transferred, and removing the hardened resin thereby. COPYRIGHT: (C)2011,JPO&INPIT
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