| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone concentrating apparatus suitably recyclable of exhaust oxygen gas. SOLUTION: In the ozone concentrating apparatus 2A, exhaust oxygen gas separated by a concentrating section 30 is discharged from an exhaust line L23 and the exhaust oxygen gas passing through the exhaust line L23 is supplied from a supply line L24 to the primary side of an ozonizer 10. Since the supply pressure of the exhaust oxygen gas supplied to the ozonizer 10 is regulated by a pressure regulating section 90A disposed in the supply line L24, mismatching in supply pressure between raw oxygen gas essentially supplied to the ozonizer 10 and the exhaust oxygen gas for recycling is prevented from occurring and the exhaust oxygen gas can be suitably recycled. COPYRIGHT: (C)2011,JPO&INPIT |
