发明名称 CLEANER AND APPLICATOR
摘要 PROBLEM TO BE SOLVED: To solve the problem wherein, in a conventional manufacturing line which performs cleaning as a pretreatment, a facility movement is necessary between a cleaning process and a coating process, and then dust floating in air is bitten into a cleaning portion after cleaning to cause insufficient wettability and adhesive strength, and the deterioration of reliability. SOLUTION: A cleaner and applicator is equipped with: a cleaning head 21 which cleans a body to be irradiated by performing spot irradiation thereon; and an applying head 22 arranged in the back side of the traveling direction of the cleaning head 21 in the relative positional relation of the cleaning head and the body to be irradiated. The cleaning and applicator performs the applying process before contaminant readheres to the cleaning portion after the cleaning process. Since a transfer process is not included between the cleaning process and the applying process, and one device performs the cleaning and applying processes, the processes and the facility are simplified. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011138889(A) 申请公布日期 2011.07.14
申请号 JP20090297383 申请日期 2009.12.28
申请人 PANASONIC CORP 发明人 KUMAZAWA KENTARO;YONEZAWA TAKAHIRO;UCHIDA OSAMU
分类号 H01L21/027;G02F1/13;G02F1/1333;H01L21/304;H01L21/60 主分类号 H01L21/027
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