| 摘要 |
<p>An ion beam system uses a separate accelerating electrode, such as a resistive tube, to accelerate the ions while maintaining a low electric field at an extended, that is, distributed, ion source, thereby improving resolution. A magneto-optical trap can be used as the ion source.</p> |
| 申请人 |
FEI COMPANY;UNITED STATES OF AMERICA AS RESPRESENTED BY THE SECRETARY OF COMMERCE, THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY;MCCLELLAND, JABEZ, J.;KNUFFMAN, BRENTON, J.;STEELE, ADAM, V.;ORLOFF, JONATHAN, H. |
发明人 |
MCCLELLAND, JABEZ, J.;KNUFFMAN, BRENTON, J.;STEELE, ADAM, V.;ORLOFF, JONATHAN, H. |
