| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reflective surface shape-controlled mirror device, which achieves achieving shape accuracy in the order of nanometers by eliminating a working error of the surface shape due to distortion caused by temperature difference during manufacturing of a mirror and an error of the surface shape due to distortion caused by installation environmental conditions during a nano light condensing operation by a laminate structure of materials having different thermal expansion coefficients, which changes an X-ray beam into an ideal wavefront, and whose focal length is variable. <P>SOLUTION: The device includes: a reflective surface shape-controlled mirror in which a band-shaped X-ray reflective surface 2 is formed on a surface central part of a substrate 1, a reference plane 3 is formed along both the sides of the X-ray reflective surface, and a plurality of piezoelectric elements 4 are arranged in the longitudinal direction of the X-ray reflective surface and jointed to the substrate on one surface at both sides of the substrate; and a multi-channel control system applying a voltage to each piezoelectric element. <P>COPYRIGHT: (C)2011,JPO&INPIT |
