DETERMINATION METHOD, EXPOSURE METHOD, ALIGNER, METHOD OF MANUFACTURING DEVICE, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To obtain movement order of a substrate stage and scanning directions of respective shots on a substrate that are advantageous in terms of throughput of a scanning aligner.

SOLUTION: An initial position of the substrate stage of the scanning aligner, a plurality of measurement positions for measuring a plurality of measurement points on a substrate held by the substrate stage, a plurality of exposure positions for exposing the plurality of shots on the substrate, and the order of sequential movement of a final position of the substrate stage to the substrate stage and the respective scanning directions of the plurality of shots are determined using a solution of a traveling salesman problem formulated under settings of a predetermined node and movement cost.

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