VIBRATING MIRROR ELEMENT AND MANUFACTURING METHOD FOR SAME

摘要

PROBLEM TO BE SOLVED: To provide a vibrating mirror element capable of suppressing bending deformation at a supporting part.

SOLUTION: The vibrating mirror element 100 includes: an X-direction optical scanning part 10 (mirror 11); a driving part 41 which includes a connection part 41c, extends in a straight line form along Y-direction and is deformable; and a connection support part 42 which is connected to the connection part 41c of the driving part 41 at an end part 42a side and extends in a straight line form along the Y-direction. The thickness t2 of the connection support part 42 is larger than the thickness t1 of the driving part 41.

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