发明名称 CAPACITIVE SENSOR DEVICE AND A METHOD OF SENSING ACCELERATIONS
摘要 The invention relates to a capacitive sensor device 100. The capacitive sensor device (100) comprises a substrate (401), a first electrode (101) coupled to the substrate (401, a second electrode (102) coupled to the substrate (401) and a movable element (103). The movable element (103) is capacitively coupled to the first electrode (101), the moveable element (103) and the first electrode (101) representing a first capacitor (104). The movable element (103) is capacitively coupled to the second electrode (102), the moveable element (103) and the second electrode (102) representing a second capacitor (105). The movable element (103) is movable between the first electrode (101) and the second electrode (102) in such a manner, that an electrical impedance between the first electrode (101) and the second electrode (102) is changeable due to a change of a position of the movable element (103). The movable element (103) is decoupled from the substrate (401), in particular to a signal line.
申请公布号 US2011169109(A1) 申请公布日期 2011.07.14
申请号 US200913119083 申请日期 2009.09.14
申请人 NXP B.V. 发明人 LANGEREIS GEERT
分类号 H01L29/84;H01L21/30 主分类号 H01L29/84
代理机构 代理人
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