| 摘要 |
A placement tool, which can move in the direction of a z-axis perpendicular to a substrate, comprises: a carriage element for a semiconductor component, said carriage element comprising a heating element; a receptacle for the carriage element, said receptacle being mounted rotatably about the z-axis at the placement tool and comprising an insulation member made of thermally insulating material; a drive for the receptacle for rotating the receptacle about the z-axis; and a feed for a cooling fluid for cooling the receptacle for the carriage element. |
